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Journal Articles Sensors and Actuators A: Physical Year : 2010

Bottom and top electrodes nature and PZT film thickness influence on electrical properties

N. Sama
Caroline Soyer
C. Verrue
  • Function : Author
R. Bouregba
  • Function : Author
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hal-00549503 , version 1 (22-12-2010)

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N. Sama, Caroline Soyer, Denis Remiens, C. Verrue, R. Bouregba. Bottom and top electrodes nature and PZT film thickness influence on electrical properties. Sensors and Actuators A: Physical , 2010, 158, pp.99-105. ⟨10.1016/j.sna.2009.11.032⟩. ⟨hal-00549503⟩
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