Journal Articles
Sensors and Actuators A: Physical
Year : 2010
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https://hal.science/hal-00549503
Submitted on : Wednesday, December 22, 2010-10:10:33 AM
Last modification on : Wednesday, February 8, 2023-5:10:49 PM
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N. Sama, Caroline Soyer, Denis Remiens, C. Verrue, R. Bouregba. Bottom and top electrodes nature and PZT film thickness influence on electrical properties. Sensors and Actuators A: Physical , 2010, 158, pp.99-105. ⟨10.1016/j.sna.2009.11.032⟩. ⟨hal-00549503⟩
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