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Pré-Publication, Document De Travail Année : 2010

Off-Axis Electron Holography for Field Mapping in the semiconductor Industry

Résumé

There is a need in the semiconductor industry for characterisation techniques that can be used to map electronic, magnetic and strain fields with nanometre-scale resolution. Here we show that off-axis electron holography is a transmission electron microscope-based technique that can be used to quantitatively map these fields for a range of different specimens
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Dates et versions

hal-00508681 , version 1 (05-08-2010)

Identifiants

  • HAL Id : hal-00508681 , version 1

Citer

David N. Cooper, Béché Armand, Martien den Hertog, Aurélien Masseboeuf, Jean-Luc Rouviere, et al.. Off-Axis Electron Holography for Field Mapping in the semiconductor Industry. 2010. ⟨hal-00508681⟩
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