Self-centered polymer microlenses deposited on SU-8 patterned surfaces by means of a cantilever-based spotter
Résumé
The properties of integrated polymer microlenses fabricated using a cantilever-based deposition tool are investigated for two types of SU-8 micro-patterned surfaces: cylindrical micropillars and large strips. In both cases, we show that a satisfactory self-centering can be obtained in view of an accurate VCSEL beam collimation.