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Conference Papers Year : 2009

Resolving contact conflict for double patterning split

N. Zeggaoui
  • Function : Author
Y. Troullier
  • Function : Author
E. Yesilada
  • Function : Author
F. Robert
J. Belledent
  • Function : Author
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Dates and versions

hal-00461055 , version 1 (03-03-2010)

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  • HAL Id : hal-00461055 , version 1

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N. Zeggaoui, V. Farys, Y. Troullier, E. Yesilada, F. Robert, et al.. Resolving contact conflict for double patterning split. BACUS conference, 2009, Monterey USA, United States. ⟨hal-00461055⟩
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