Laser and LED based optical diagnostic techniques applied in industrial plasma etch reactors - Archive ouverte HAL
Communication Dans Un Congrès Année : 2009
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hal-00461002 , version 1 (03-03-2010)

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  • HAL Id : hal-00461002 , version 1

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N. Sadeghi, G. Cunge, D. Vempaire, M. Touzeau, R. Ramos, et al.. Laser and LED based optical diagnostic techniques applied in industrial plasma etch reactors. 56th International AVS Symposium & Topical Conferences, 2009, San Jose, United States. ⟨hal-00461002⟩
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