Monitoring of critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller matrix polarimetry - Archive ouverte HAL
Article Dans Une Revue Physica Status Solidi A (applications and materials science) Année : 2008

Monitoring of critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller matrix polarimetry

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hal-00458680 , version 1 (22-02-2010)

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  • HAL Id : hal-00458680 , version 1

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Martin Foldyna, Antonello de Martino, Enric Garcia-Caurel, Razvigor Ossikovski, François Bertin, et al.. Monitoring of critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller matrix polarimetry. Physica Status Solidi A (applications and materials science), 2008, 205, pp.806. ⟨hal-00458680⟩
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