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Article Dans Une Revue Plasma Sources Science and Technology Année : 2009

Dust formation in Ar/CH4 and Ar/C2H2 plasmas

Résumé

This paper discusses the growth of nanoparticles in capacitively and inductively coupled radio-frequency plasmas operated in hydrocarbon gases and the back-reaction of particles on the plasma properties. The focus is on the growth mechanism in CH4- and C2H2-containing plasmas, on the role of atomic hydrogen and on the dynamic charging and decharging of particles in pulsed plasmas.

Dates et versions

hal-00454887 , version 1 (09-02-2010)

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Jörg Winter, Johannes Berndt, Suk Ho Hong, Eva Kovacevic, I. Stefanovic, et al.. Dust formation in Ar/CH4 and Ar/C2H2 plasmas. Plasma Sources Science and Technology, 2009, 18, pp.034010. ⟨10.1088/0963-0252/18/3/034010⟩. ⟨hal-00454887⟩
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