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Article Dans Une Revue IEEE Sensors Journal Année : 2010

Force sensors based on screen-printed cantilevers

Résumé

In this paper, the design, the fabrication and the characterization of ceramic screen-printed force sensors are described. They are based on the use of cantilevers with integrated piezoresistors. The choice of the materials constituting the cantilever and the strain gauge, so as the dimensions of the cantilever have been optimized in order to measure forces in mN range. The sensors have been fabricated using the screenprinting technique associated with the sacrificial layer technique to release the free-standing part of the cantilevers. Afterwards, they have been characterized: measurement of sensitivity, reproducibility and materials properties (Young’s modulus and strain gauge factor). The performances of these sensors are compared to the existing silicon, polymer and ceramic sensors.
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Dates et versions

hal-00453483 , version 1 (13-11-2014)

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Riadh Lakhmi, Hélène Debéda, Isabelle Dufour, Claude Lucat. Force sensors based on screen-printed cantilevers. IEEE Sensors Journal, 2010, 10 (6), pp.1133-1137. ⟨10.1109/JSEN.2010.2040387⟩. ⟨hal-00453483⟩
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