Force sensors based on screen-printed cantilevers
Résumé
In this paper, the design, the fabrication and the characterization of ceramic screen-printed force sensors are
described. They are based on the use of cantilevers with integrated piezoresistors. The choice of the materials constituting
the cantilever and the strain gauge, so as the dimensions of the cantilever have been optimized in order to measure forces in mN
range. The sensors have been fabricated using the screenprinting technique associated with the sacrificial layer technique
to release the free-standing part of the cantilevers. Afterwards, they have been characterized: measurement of sensitivity,
reproducibility and materials properties (Young’s modulus and strain gauge factor). The performances of these sensors are
compared to the existing silicon, polymer and ceramic sensors.
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