Article Dans Une Revue Surface and Coatings Technology Année : 2007

Organometallic precursors as catalyst to grow three dimensional micro/nano structures: spheres, clusters and wires

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This paper presents the growth and characterization of three-dimensional structures using metal-organic (or organometallic) chemical precursors like M(CH3)3, where M is a metal. Their morphology depends principally on growth temperature and conditions at the surface of the substrate. These 3D structures can be separated into two classes: i) one with (Ga, Al, In) metallic alloys shaped as sphere, sceptre or cylinder and a carbon membrane covering the alloy; ii) other with semiconductor or oxide nanowires capped by a metallic sphere. The metal-organic precursors can be seen as catalysts molecules that grow semiconductors with micro and nano-structures similar to the role of gold particles used to grow nanowires in the VLS mechanism. We present the MOCVD growth of Ga2O3, CuGaxOyand (Ga,In)P nanowires using the metal-organic precursors on metallic or metal containing substrates.

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hal-00444354 , version 1 (24-02-2010)

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M. Sacilotti, Pierre Cheyssac, Gilles Patriarche, J. Decobert, Th. Chiaramonte, et al.. Organometallic precursors as catalyst to grow three dimensional micro/nano structures: spheres, clusters and wires. Surface and Coatings Technology, 2007, 201, pp.9104. ⟨10.1016/j.surfcoat.2007.03.056⟩. ⟨hal-00444354⟩
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