Plasma polymer process for microfluidic devices fabrication
Abstract
Plasma polymerization, so called Remote Plasma Enhanced Chemical Vapour Deposition (RPECVD) has been increasingly used in microsystems field. Plasma polymers served primarily as supports for electronic sensors or carriers for biomolecules and cell attachment. This work describes the first use of plasma thin film deposition for the easy, fast and reduced cost fabrication of microfluidic channels. A new method named “plasma polymerization on a micropatterned surface” (PPMS) is presented.