Dynamics of a pulsed-electron beam induced plasma: application to the growth of zinc oxide thin films - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Physics D: Applied Physics Année : 2008

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hal-00442803 , version 1 (22-12-2009)

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Sylvain Tricot, Chantal Boulmer-Leborgne, Magda Nistor, Eric Millon, Jacques Perrière. Dynamics of a pulsed-electron beam induced plasma: application to the growth of zinc oxide thin films. Journal of Physics D: Applied Physics, 2008, 41 (17), pp.175205. ⟨10.1088/0022-3727/41/17/175205⟩. ⟨hal-00442803⟩
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