Communication Dans Un Congrès Année : 2009

Spectroscopic ellipsometry study of the optical properties of microwave CVD grown silicon nanoparticles embedded in a silicon nitride matrix

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hal-00429334 , version 1 (02-11-2009)

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  • HAL Id : hal-00429334 , version 1

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A.S. Keita, A. En Naciri, F. Delachat, Marzia Carrada, G. Ferblantier, et al.. Spectroscopic ellipsometry study of the optical properties of microwave CVD grown silicon nanoparticles embedded in a silicon nitride matrix. 12th International Conference on the Formation of Semiconductor Interfaces (ICFSI-12), Jul 2009, Weimar, Germany. ⟨hal-00429334⟩
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