Effect of physical defect on shmoos in CMOS DSM technologies
A. Machouat
(1)
,
G. Haller
(1)
,
V. Goubier
(1)
,
Dean Lewis
(2)
,
Philippe Perdu
(3)
,
Vincent Pouget
(2)
,
Pascal Fouillat
(2)
,
Fabien Essely
(2)
Vincent Pouget
- Function : Author
- PersonId : 21573
- IdHAL : vincent-pouget
- ORCID : 0000-0001-6126-6708
- IdRef : 060649313