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Communication Dans Un Congrès Année : 2008

Ar Ion Sputtering of GaAs Studied by Molecular Dynamics Simulation and Laser Spectroscopy of Ga Atoms in the Gas Phase

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hal-00400658 , version 1 (01-07-2009)

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  • HAL Id : hal-00400658 , version 1

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E. Despiau-Pujo, P. Chabert, R. Ramos, G. Cunge, N. Sadeghi. Ar Ion Sputtering of GaAs Studied by Molecular Dynamics Simulation and Laser Spectroscopy of Ga Atoms in the Gas Phase. 55th International AVS Symposium & Topical Conferences, Oct 2008, boston, United States. ⟨hal-00400658⟩
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