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Communication Dans Un Congrès Année : 2008

Velocity distribution of Al sputtered atoms in an ICP reactor by laser absorption and Laser Induced Fluorescence

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hal-00398880 , version 1 (25-06-2009)

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  • HAL Id : hal-00398880 , version 1

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R. Ramos, M. Touzeau, G. Cunge, N. Sadeghi. Velocity distribution of Al sputtered atoms in an ICP reactor by laser absorption and Laser Induced Fluorescence. 9th Asia-Pacific Conference on Plasma Science and Technology (APCPST) and 21st Symposium on Plasma Science for Materials (SPSM), 2008, China. ⟨hal-00398880⟩
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