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Communication Dans Un Congrès Année : 2007

Chamber Walls Coatings During Patterning of Dielectric Damascene Structures With a Metallic Hard Mask: Consequences on Cleaning Strategies

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hal-00398870 , version 1 (25-06-2009)

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  • HAL Id : hal-00398870 , version 1

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T. Chevolleau, Maxime Darnon, T. David, N. Posseme, O. Joubert. Chamber Walls Coatings During Patterning of Dielectric Damascene Structures With a Metallic Hard Mask: Consequences on Cleaning Strategies. Proceeding of PESM, Plasma Etch and Strip in Microelectronics (Workshop), 2007, leuven, Belgium. ⟨hal-00398870⟩
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