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Communication Dans Un Congrès Année : 2007

Restoring the chamber walls surfaces of plasma reactors exposed to repeated fluorine-based plasma cleans

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hal-00398865 , version 1 (25-06-2009)

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  • HAL Id : hal-00398865 , version 1

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R. Ramos, G. Cunge, B. Pelissier, O. R. Joubert, T. Chevolleau. Restoring the chamber walls surfaces of plasma reactors exposed to repeated fluorine-based plasma cleans. 16th International Colloquium on Plasma processes (CIP), 2007, toulouse, France. ⟨hal-00398865⟩
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