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Communication Dans Un Congrès Année : 2008

Test Structure Definition for Dummy Metal Filling Strategy Dedicated to Advanced Integrated RF Inductors

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Dates et versions

hal-00397724 , version 1 (23-06-2009)

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  • HAL Id : hal-00397724 , version 1

Citer

C. Pastore, F. Gianesello, D. Gloria, E. Serret, Ph. Benech. Test Structure Definition for Dummy Metal Filling Strategy Dedicated to Advanced Integrated RF Inductors. IEEE International Conference on Microelectronic Test Structures,, Mar 2008, -, France. ⟨hal-00397724⟩
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