Roles of oxygen and solvent in the interface formation during the pulsed-liquid injection PE-MOCVD deposition of Y2O3 in MIM and MOS structures - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2004

Roles of oxygen and solvent in the interface formation during the pulsed-liquid injection PE-MOCVD deposition of Y2O3 in MIM and MOS structures

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hal-00390506 , version 1 (02-06-2009)

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  • HAL Id : hal-00390506 , version 1

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C. Durand, Corentin Vallée, M. Bonvalot. Roles of oxygen and solvent in the interface formation during the pulsed-liquid injection PE-MOCVD deposition of Y2O3 in MIM and MOS structures. 51st National Symposium AVS,, 2004, Anaheim, United States. ⟨hal-00390506⟩
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