Control of 3C-SiC/Si wafer bending by the "checker-board" carbonization method - Archive ouverte HAL Access content directly
Conference Papers Year : 2005

Control of 3C-SiC/Si wafer bending by the "checker-board" carbonization method

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hal-00389901 , version 1 (30-05-2009)

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Thierry Chassagne, Gabriel Ferro, H. Haas, H. Mank, André Leycuras, et al.. Control of 3C-SiC/Si wafer bending by the "checker-board" carbonization method. International Workshop on Expert Evaluation & Control of Compound Semiconductor Materials & Technologies (EXMATEC 2004), Jun 2004, MONTPELLIER, France. pp.524-530, ⟨10.1002/pssa.200460415⟩. ⟨hal-00389901⟩
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