Integrated Design of MEMS: Designing Manufacturable Products - Archive ouverte HAL
Conference Papers Year : 2005

Integrated Design of MEMS: Designing Manufacturable Products

Matthieu Museau
Conception Produit Process
Cédric Masclet
Conception collaborative
CV

Domains

Mechanical engineering [physics.class-ph] Mechanical engineering [physics.class-ph] Micro and nanotechnologies/Microelectronics
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https://hal.science/hal-00375196

Submitted on : Monday, July 10, 2023-5:34:01 PM

Last modification on : Thursday, April 4, 2024-8:50:18 PM

Long-term archiving on : Wednesday, October 11, 2023-7:33:29 PM

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Dates and versions

hal-00375196 , version 1 (10-07-2023)

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  • HAL Id : hal-00375196 , version 1

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Matthieu Museau, Cédric Masclet. Integrated Design of MEMS: Designing Manufacturable Products. MIT'05, 8th International Conference on Management of Innovative technologies ; Org. Laboratory for Alternative Technologies, Sep 2005, Fiesa, Slovenia. ⟨hal-00375196⟩

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