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Communication Dans Un Congrès Année : 2007

Ultra low K dielectrics for microelectronics studied by GISAXS

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hal-00373862 , version 1 (07-04-2009)

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  • HAL Id : hal-00373862 , version 1

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J.P. Simon. Ultra low K dielectrics for microelectronics studied by GISAXS. BCA meeting, Jul 2007, France. ⟨hal-00373862⟩

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