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Patents Year : 2004

Tunable bimetallic microresonator formed on an isolated flexible beam

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Dates and versions

hal-00372446 , version 1 (01-04-2009)

Identifiers

  • HAL Id : hal-00372446 , version 1

Cite

G. Bouche, P. Ancey, G. Caruyer. Tunable bimetallic microresonator formed on an isolated flexible beam. Patent n° : EP1468960 (A2). 2004. ⟨hal-00372446⟩
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