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Article Dans Une Revue Microelectronics Reliability Année : 1994

Functionnal localization in integrated circuits by Signal Selective Voltage Contrast in a scanning electron microscope

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hal-00326620 , version 1 (03-10-2008)

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  • HAL Id : hal-00326620 , version 1

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François Marc, Hélène Frémont, Paul Jounet, Yves Danto, Michel Barré. Functionnal localization in integrated circuits by Signal Selective Voltage Contrast in a scanning electron microscope. Microelectronics Reliability, 1994, 24, pp.295-301. ⟨hal-00326620⟩
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