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Communication Dans Un Congrès Année : 2007

Improvement of Silicon-Based Thin Film Transistor Performances by Modifying Technological Fabrication Process Steps: a Similar Approach with ULSI Technology

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hal-00318552 , version 1 (04-09-2008)

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  • HAL Id : hal-00318552 , version 1

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Olivier Bonnaud, Tayeb Mohammed-Brahim. Improvement of Silicon-Based Thin Film Transistor Performances by Modifying Technological Fabrication Process Steps: a Similar Approach with ULSI Technology. ULSI vs TFT 2007 Int. Conf. on Semiconductor Technology, ECS Conference, Jul 2007, Barga, Italy. ⟨hal-00318552⟩
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