Improvement of Silicon-Based Thin Film Transistor Performances by Modifying Technological Fabrication Process Steps: a Similar Approach with ULSI Technology - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue ECS Transactions Année : 2007

Improvement of Silicon-Based Thin Film Transistor Performances by Modifying Technological Fabrication Process Steps: a Similar Approach with ULSI Technology

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hal-00318551 , version 1 (04-09-2008)

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  • HAL Id : hal-00318551 , version 1

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Olivier Bonnaud, Tayeb Mohammed-Brahim. Improvement of Silicon-Based Thin Film Transistor Performances by Modifying Technological Fabrication Process Steps: a Similar Approach with ULSI Technology. ECS Transactions, 2007, 8 (1), pp.51-56. ⟨hal-00318551⟩
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