A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners
H. Muro
(1)
,
T. Oki
(1)
,
A. Asaoka
(1)
,
Tarik Bourouina
(2)
,
Gilbert Reyne
(3)
,
A. Debray
(1)
,
E. Lebrasseur
(1)
,
Hiroyuki Fujita
(4)
Tarik Bourouina
- Function : Author
- PersonId : 18824
- IdHAL : tarik-bourouina
- ORCID : 0000-0003-2342-7149
- IdRef : 110802160