A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue IEEJ, Trans.SM Année : 2007

A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners

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hal-00283361 , version 1 (29-05-2008)

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H. Muro, T. Oki, A. Asaoka, Tarik Bourouina, Gilbert Reyne, et al.. A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners. IEEJ, Trans.SM, 2007, 127 (1), ⟨10.1541/ieejsmas.127.31⟩. ⟨hal-00283361⟩
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