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Communication Dans Un Congrès Année : 2008

Measurement of Large Forces and Deflections in Microstructures

Kai Axel Hals
  • Fonction : Auteur
  • PersonId : 848977
Einar Halvorsen
  • Fonction : Auteur
  • PersonId : 848974
Xuyuan Chen
  • Fonction : Auteur
  • PersonId : 848978

Résumé

Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure force/deflection on microstructures to examine some of the structural properties. This is a stylus setup integrated with a load cell and a linear actuator. First, the requirements for the measurement system were established. Then the system was built up and characterized. We have successfully made measurements on a typical micromechanical structure, a cantilever accelerometer design. The stylus placement accuracy, the spring constant along the proof mass, analysis of the force/deflection curve shape and destructive tests on the cantilever have been investigated in our experiment and will be presented in this paper.

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Autre [cs.OH]
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Dates et versions

hal-00277737 , version 1 (07-05-2008)

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Kai Axel Hals, Einar Halvorsen, Xuyuan Chen. Measurement of Large Forces and Deflections in Microstructures. DTIP 2008, Apr 2008, Nice, France. pp.339-344. ⟨hal-00277737⟩

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