TRING-module : a high-range and high-precision 2DoF microsystem dedicated to a modular micromanipulation station.
Résumé
As part of a microfactory concept, a micromanipulation station is made up of two independant microsystems having each one two degrees of freedom (rotation and linear motions). That allows the station to manipulate microparts with a high range of dimensions, from 10 microns to some millimeters (2 mm). This paper presents one of these microsystems called TRING-module.
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