High power applications of RF-MEMS
Résumé
This paper presents recent results on the development of high power MEMS switched varactors. Design methodology as well as fabrication and measurement results are presented. The MEMS varactors are made of a thick metal gold cantilever, with a reduced contact area, that allows to control high power microwave signals. Operation up to 5 watts CW is demonstrated, with good reliability. First results on applications to phase shifters is presented