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Communication Dans Un Congrès Année : 2007

GISAXS studies of dielectrics thin films for ultra large scaled integrated microelectronics

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hal-00203996 , version 1 (11-01-2008)

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  • HAL Id : hal-00203996 , version 1

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J.P. Simon. GISAXS studies of dielectrics thin films for ultra large scaled integrated microelectronics. 2nd GISAXS worshop, 2007, France. ⟨hal-00203996⟩

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