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Article Dans Une Revue Applied Physics Letters Année : 2007

Self-oscillation mode due to fluid-structure interaction in a micromechanical valve

Résumé

This letter presents an original actuation mode for a micromechanical valve based on the induction of a self-oscillation, provided by the strong coupling between a mobile mechanical part and the fluid flow. The presented structure consists of a rigid silicon pad processed on a flexible membrane, both located over a silicon microchannel with structured internal walls. A theoretical analysis, based on a combination of the small perturbations method and a numerical study, shows that a self-oscillation can be induced on the mobile part due to the hybridization of the first flexion and torsion resonance modes interacting with the gas flow. Characterization of the self-oscillating microvalve shows high performances without electric energy supply for control.
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Dates et versions

hal-00203691 , version 1 (11-01-2008)

Identifiants

Citer

Olivier Ducloux, Abdelkrim Talbi, Laetitia Gimeno, Romain Viard, Philippe Pernod, et al.. Self-oscillation mode due to fluid-structure interaction in a micromechanical valve. Applied Physics Letters, 2007, 91 (3), pp.034101. ⟨10.1063/1.2752530⟩. ⟨hal-00203691⟩
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