Journal Articles
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Year : 2005
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https://hal.science/hal-00183524
Submitted on : Tuesday, October 30, 2007-9:06:47 AM
Last modification on : Monday, September 23, 2024-9:22:24 AM
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- HAL Id : hal-00183524 , version 1
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Lionel Hirsch, Pascal Tardy, Guillaume Wantz, Nolwen Huby, P. Moretto, et al.. Light-ion beam analysis for microelectronic applications. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2005, 240, pp.1. ⟨hal-00183524⟩
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