Analytical modeling of microcantilever and microbridge type chemical sensors: optimisation of the gravimetric sensitivity - Archive ouverte HAL
Communication Dans Un Congrès Année : 2002

Analytical modeling of microcantilever and microbridge type chemical sensors: optimisation of the gravimetric sensitivity

Résumé

In this paper, we study the moving sensors based on the change of the resonance frequency. Usually in such microsensors, the vibrating microstructures are parallelepiped-shaped or standard AFM V-shaped microcantilevers with sensitive coating at the free end. The aim of this paper is to find an optimized shape to obtain the maximal gravimetric sensitivity.

Domaines

Micro et nanotechnologies/Microélectronique

Isabelle Dufour  : Connectez-vous pour contacter le contributeur

https://hal.science/hal-00183281

Soumis le : mardi 6 novembre 2007-21:14:16

Dernière modification le : lundi 5 juin 2023-16:52:11

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Dates et versions

hal-00183281 , version 1 (06-11-2007)

Identifiants

  • HAL Id : hal-00183281 , version 1

Citer

Isabelle Dufour, Ludivine Fadel. Analytical modeling of microcantilever and microbridge type chemical sensors: optimisation of the gravimetric sensitivity. 9th International Meeting on Chemical Sensors, 2002, Boston, United States. 1 page. ⟨hal-00183281⟩

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