Plateforme à ondes de Love pour la caractérisation de matériaux micro et nano structurés
Résumé
Acoustic wave sensors uses more and more often micro and nano-structured thin film new materials. This lead to an increasing need for materials viscoelastic properties calculation. A new material characterization method is proposed allowing the material properties characterization directly with a Love-wave sensor platform. The characterization method determines material layer density and shear modulus by fitting simulation results to experimental measurements. First results concern the characterization of Love-wave SiO2 guiding layer and demonstrate that using characterized SiO2 mass density and shear modulus allows to simulate accurately the wave phase velocity of Love-wave devices with different SiO2 guiding layer thicknesses.