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Communication Dans Un Congrès Année : 2005

Active damping of electronic micro components with piezoelectrically-transduced silicon MEMS devices

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hal-00158974 , version 1 (02-07-2007)

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  • HAL Id : hal-00158974 , version 1

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Yann Meyer, Manuel Collet, J. Baborowski, P. Muralt, Patrick Delobelle. Active damping of electronic micro components with piezoelectrically-transduced silicon MEMS devices. 2005, Lisbonne, Portugal. ⟨hal-00158974⟩
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