A new type of one-shot MEMS based thermal micro switch is described and its performance results are presented. The device consists in mechanically breaking a metallic line or locally soldering two metallic lines. The switching between the two stable states (on or off) is accomplished by a current pulse through an integrated heater underneath the electrical lines needed to be interrupted or connected. Some key features are summarized as follows: switches are bistable, integratable and IC compatible. They are compatible with low voltage operation (5V), no contact resistance (0 Ω for the on-off and ~0.008Ω for the off-on); they are low energy consumption during switching (3.5mJ for on-off and 130mJ for off-on); switching current is between 10 and 20mA for on-off and between 50-70mA for off-on concept. The minimum switching pulse width is 7ms and 300ms for the on-off and off-on concept respectively; operation may be possible in ambient environment; lifetime expected is very long and both switches can therefore address long life system. Batch fabrication using planar processing methods are used.