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Communication Dans Un Congrès Année : 2006

Experimental study of nanocrystallite formation and growth in an Ar/SiH4 radiofrequency plasma at temperatures below 0°C

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hal-00101330 , version 1 (26-09-2006)

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  • HAL Id : hal-00101330 , version 1

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Marjorie Cavarroc, Maxime Mikikian, Laifa Boufendi. Experimental study of nanocrystallite formation and growth in an Ar/SiH4 radiofrequency plasma at temperatures below 0°C. 6th Intern. Conf. on Reactive Plasmas and 23rd Symp. on Plasma Processing, 2006, Matsushima-Sendai, Japan. ⟨hal-00101330⟩
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