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Article Dans Une Revue Journal of the Korean Physical Society Année : 2005

Nanostructuring Optical Waveguides by Focused Ion Beam Milling. Near-Field Characterization.

Résumé

Nanostructures have become an attractive subject due to many applications, particularly the photonic bandgap effect observed in photonic crystals. Nevertheless, the fabrication of such structures remains a challenge because of accurate requirement concerning regularity, shape, hole depth etc. of the structure. E-beam lithography permits a good control of dimensional parameters but needs a 1-step fabrication process. In our work, we have to combine traditional strip-load waveguides (SiO2/SiON/SiO2 on Si) and nanostructures whose dimension are totally different. This imposes a 2-step process where waveguides and nanostructures are successively fabricated. We have at our disposal different ways to characterize these nanostructures. A direct aspect control during and after FIB treatment can be achieved by FIB and SEM imaging. Scanning near-field optical microscopy (SNOM) is currently the most effective way to test guiding confinement in such surface structures by detecting the evanescent field.
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Dates et versions

hal-00095678 , version 1 (25-01-2008)

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F. Lacour, A. Sabac, M. Spajer. Nanostructuring Optical Waveguides by Focused Ion Beam Milling. Near-Field Characterization.. Journal of the Korean Physical Society, 2005, 47 (91), pp.S175-S181. ⟨hal-00095678⟩
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