Design, testing and calibration of an integrated Mach–Zehnder–based optical read–out architecture for MEMS characterization - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2004
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hal-00095115 , version 1 (15-09-2006)

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  • HAL Id : hal-00095115 , version 1

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A. Sabac, C. Gorecki, M. Jozwik, T. Dean, A. Jacobelli. Design, testing and calibration of an integrated Mach–Zehnder–based optical read–out architecture for MEMS characterization. 2004, pp. 141-146. ⟨hal-00095115⟩
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