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Communication Dans Un Congrès Année : 2003

Integrated Optomechanical sensor for in situ characterization of MEMS : the implementing of a readout architecture

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Dates et versions

hal-00094424 , version 1 (14-09-2006)

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  • HAL Id : hal-00094424 , version 1

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C. Gorecki, A. Sabac, P. Bey, K. Gut, A. Jacobelli, et al.. Integrated Optomechanical sensor for in situ characterization of MEMS : the implementing of a readout architecture. 2003, pp. 189-195. ⟨hal-00094424⟩
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