Evaluation of micromechanical properties of buckled SiOxNy–loaded membranes by combining the Twyman–Green interferometry with nanoindentation and point– wise deflection technique - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Optics and Lasers in Engineering Année : 2002
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hal-00093959 , version 1 (14-09-2006)

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M. Jozwik, C. Gorecki, A. Sabac, P. Delobelle, M. Kujawinska. Evaluation of micromechanical properties of buckled SiOxNy–loaded membranes by combining the Twyman–Green interferometry with nanoindentation and point– wise deflection technique. Optics and Lasers in Engineering, 2002, 41, pp.703-716. ⟨hal-00093959⟩
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