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Communication Dans Un Congrès Année : 1999

Design and test of next generation integrated systems embedding MEMS

Résumé

This paper presents an overview of microelectromechanical systems (MEMS) research topics. Manufacturing technologies, including bulk and surface micromachining, are illustrated using fabricated devices. Optimal exploitation of these technologies relies on the integration in a single chip of MEMS parts with their electronic interfaces. Current challenges for bringing the analysis, design and test of these new generation of devices in line with microelectronics are then discussed.
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Dates et versions

hal-00013021 , version 1 (02-11-2005)

Identifiants

  • HAL Id : hal-00013021 , version 1

Citer

Salvador Mir. Design and test of next generation integrated systems embedding MEMS. ECS'99.-Proceedings-of-the-2nd-Electronics-Circuits-and-Systems-Conference, 1999, Bratislava, Slovakia. pp.301-10. ⟨hal-00013021⟩

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