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Communication Dans Un Congrès Année : 2003

A sweeping mode integrated tactile fingerprint sensor

Résumé

We report recent advances in the development of a tactile fingerprint sensor made by a CMOS compatible frontside bulk micromachining technology. This device enables the measurement of a fingerprint by the way of a mechanical scanning principle of the finger's roughness. While this sensing principle has shown good results on a first reduced length prototype, we present here the design, fabrication and test of a new sensor. This sensor contain 256 pressure sensitive microbeams for a total length of 1.28 cm and is integrated with analog and mixed signal electronics
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Dates et versions

hal-00007820 , version 1 (08-08-2005)

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Citer

B. Charlot, F. Parrain, N. Galy, B. Courtois. A sweeping mode integrated tactile fingerprint sensor. 2003, pp.1031-4 vol.2, ⟨10.1109/JMEMS.2004.832195⟩. ⟨hal-00007820⟩

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