Reduced-order modeling of electrostatic MEMS resonators
Résumé
This is a handout for my course on MEMS physics and modeling at Université Paris-Saclay. It contains useful formulas for modeling the behavior of electrostatically-actuated 2- and 3-port cantilever / CC-beam resonators oscillating close to their first resonance frequency, in their nonlinear regime. Nonlinear damping is neglected but may be included using the procedure given in the handout.
Feel free to contact me if you have any questions / comments regarding this material.
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