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Discharge frequency and reagents choice effects on robustness of silicon nitride (Si3N4) thin layers deposited by PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Catheline Cazako , Karim Inal , Alain Burr , Frédéric Georgi , Rodolphe Cauro et al.
European Conference on Heat Treatment and Surface Engineering, Jun 2017, Nice, France
Conference papers hal-01721378v1
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Hypothetic impact of chemical bonding on the moisture resistance of amorphous SixNyHz by plasma-enhanced chemical vapor deposition

Catheline Cazako , Karim Inal , Alain Burr , Frédéric Georgi , Rodolphe Cauro et al.
Metallurgical Research & Technology, 2018, 115 (4), pp.406. ⟨10.1051/metal/2018072⟩
Journal articles hal-02968666v1

The impact of nitrogen plasma treatments on SixNyHz moisture sensitivity

Catheline Cazako , Karim Inal , Alain Burr , Frédéric Georgi
Conference on Plasma Based Ion Implantation & Deposition, Oct 2017, Shanghai, France
Conference papers hal-01721379v1