ELECTRICAL PERFORMANCES COMPARISON OF SEMI AND FULLY RECESSED ISOLATION STRUCTURES
Résumé
Electrical characteristics of semi-recessed and fully-recessed LOCOS isolation techniques are analyzed. Two-dimensionnal process/device simulations, performed with the IMPACT package, have demonstrated the effect of the Si/SiO2 interface shape on isolation efficiency. An excellent agreement has been found between simulations and measurements for the studied structures.
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Articles anciens
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