Communication Dans Un Congrès Année : 2025

Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes

Résumé

This work is a step towards the 3D integration of millimeter-wave and THz circuits and subsystems with a nano-packaging technology using vertically aligned carbon nanotubes (VACNTs). In doing so, we have developed and optimized a fabrication process based on a low temperature transfer of VACNT, allowing to successfully implement millimeter-wave air filled cavities and filters towards 75 GHz. The circuits were designed and optimized using a finite element modeling tool. We particularly studied the impact of the VACNT density, which allowed to bridge the gap between device design and fabrication. The measured insertion loss values for the cavity and the filter are 3.78 dB and 4.38 dB, respectively. These experimental values obtained are in excellent agreement with the calculated ones, which paves the way for the 3D integration of more complex and higher frequency functions using this vertically aligned carbon nanotube technology.

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Ankit Kumar Verma, Rongtao Jiang, Jianping Zou, Chong Wei Tan, Amit Kumar, et al.. Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes. 2025 IEEE/MTT-S International Microwave Symposium - IMS 2025, Jun 2025, San Francisco, United States. pp.862-865, ⟨10.1109/IMS40360.2025.11103942⟩. ⟨hal-05308584⟩
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